Turnkey EUV light sources

Turnkey euv light sources

Adlyte provides the semiconductor industry with high brightness extreme ultraviolet (EUV) sources. Our laser produced plasma technology enables manufacturing of nano-scale devices.

Companies producing EUV lithography and inspection tools can depend on the reliability and operational performance of Adlyte’s EUV sources. Adlyte’s products are designed to enable high efficiency and uptime in high volume manufacturing environment.

Adlyte is working with industry leaders to ease the path for EUV lithography by enabling the technology and reducing the overall cost of ownership.

Latest Publications

Clean and stable LPP light source for HVM inspection applications
Bob Rollinger; Nadia Gambino; Andrea Z. Giovannini; Luna S. Bozinova; Flori Alickaj; Konrad Hertig; Reza S. Abhari; Fariba Abreau
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V, 90482K. (April 17, 2014) doi: 10.1117/12.2046416
Read the abstract | Download the paper

Temporal and spatial dynamics of a laser-produced plasma through a multiple Langmuir probe detector
Nadia Gambino; Markus Brandstätter; Bob Rollinger; Reza S. Abhari
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V, 90482I. (April 17, 2014) doi: 10.1117/12.2046378
Read the abstract | Download the paper

View our publications archive