EUV LIGHT SOURCE DEVELOPER ADLYTE ACHIEVES KEY PERFORMANCE MILESTONE FOR HIGH-VOLUME MANUFACTURING
ZUG, Switzerland, October 22, 2014 – Adlyte Inc., a developer of high-brightness extreme light sources for advanced semiconductor inspection and metrology applications, today announced it has reached a key performance benchmark for its extreme ultraviolet (EUV) light source for high-volume manufacturing (HVM)-readiness. Adlyte has demonstrated that its EUV light source has maintained clean operation after intermediate focus while running for hundreds of hours replicating multiple parameters for a production environment—including power, brightness and uptime—established by mask inspection original equipment manufacturers (OEMs). Reaching this milestone is the latest example of Adlyte's continuous efforts to productize HVM-ready EUV light sources with advanced debris mitigation and novel irradiation technology.
One of three laser produced plasma (LPP) EUV light-source suppliers in the world, Adlyte is the only one focused on developing light sources for photomask and wafer inspection applications, which are critical for manufacturing future generations of advanced semiconductor devices.
"Mask inspection is a critical part of the EUV lithography infrastructure, and having actinic or 'at wavelength' exposure that meets several key criteria, including cleanliness, is the optimal solution for finding the defects that matter on EUV masks," stated Hidehiro Watanabe, general manager, EUVL Infrastructure Development Center (EIDEC). "We are pleased with the cleanliness we measured on Adlyte's light source under conditions that replicate a production environment. This meets our requirements for blank mask inspection."
Importance of "clean" EUV light sources
About Adlyte Inc.:
Adlyte is a pioneer in developing high-brightness extreme ultraviolet (EUV) light sources for the semiconductor industry. Adlyte was formed in 2009 as a spin-off from ETH Zurich to commercialize the technology, IP and patents developed at ETH over the past 7 years. Adlyte applies fundamental breakthroughs in plasma physics and thermal management to produce an